Comparison ledger
Hitachi S-4800, KLA .496 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | S-4800Hitachi | |
|---|---|---|
| OEM | Hitachi | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi S 4800 | KLA .496 PSL Wafer |
| Specifications | ||
| Microscope type | FESEM[1] | — |
| Model | S4800[1] | — |
| OEM | Hitachi[1] | — |
| instrument type | FESEM[1] | — |
| electron source | cold field-emission source[1] | — |
| detectors | STEM and EDX detectors[1] | — |
| instrument designation | Hitachi S-4800 HR-SEM[2] | — |
| Configuration | — | NIST Traceable[3] |
| Wafer size | — | 8 inch[3] |
| Traceability | — | NIST Traceable[3] |
| Compatible systems | — | Capable on Surfscan 6xy0 and SP1[3] |
| Category | — | Metrology & Inspection[4] |
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