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Comparison ledger

8840 CD-SEMversus0035235-003 MMD Head

Hitachi 8840 CD-SEM, KLA 0035235-003 MMD Head, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMHitachiKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi 8840 CD-SEMKLA 0035235-003 MMD Head
Specifications
OEMHitachi[1]—
Model8840[1]0035235-003[3]
Tool typeCritical Dimension Scanning Electron Microscope (CD-SEM)[1]—
CategoryMetrology & Inspection[2]—
Wafer size6 inch[1]—
Asset #71769[1]—
Last confirm dateJune 05, 2023[1]—
Configuration—TSTD PCB ASSY, MMD MEAS HEAD[3]
Make—KLA[3]
Part Description—TSTD PCB ASSY, MMD MEAS HEAD[3]
Compatible System—KLA AIT-XP[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing