Comparison ledger
Hitachi 1305 BSG 3, SCREEN SU 3100 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | SU 3100 WaferSCREEN |
|---|---|---|
| OEM | Hitachi | SCREEN |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | SCREEN SU 3100 Wafer |
| Specifications | ||
| Configuration | — | 8ch[1] |
| Status | — | Failure on Part: MPC2 Shutter Plate Rotation Motor – Alarm[1] |
| Vintage | — | 2010[1] |
| HDD Status | — | No HDD[1] |
| Model | — | SU 3100[1] |
| Make | — | SCREEN / DNS[1] |
| Number of Chambers | — | 8[2] |
| Number of FOUP Load Ports | — | 4[2] |
| HDD | — | No HDD[1] |
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