Comparison ledger
Hitachi 1305 BSG 3, MKS AX 8406 A Ozone, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | |
|---|---|---|
| OEM | Hitachi | MKS |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | MKS AX 8406 A Ozone |
| Specifications | ||
| Configuration | — | 50/60 Hz[1] |
| Voltage | — | 208V[1] |
| Phase | — | 3 Phase[1] |
| Frequency | — | 50/60 Hz[1] |
| Current | — | 20A[1] |
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