Comparison ledger
Hitachi 1305 BSG 3, Karl Suss PM5, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | PM5Karl Suss |
|---|---|---|
| OEM | Hitachi | Karl Suss |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | up to 6-inch wafers |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Karl Suss PM5 |
| Specifications | ||
| Microscope | — | stereo microscope[1] |
| Vacuum chuck | — | 6-inch vacuum chuck[1] |
| Maximum wafer size | — | up to 6-inch wafers[1] |
| Micromanipulators | — | 4 micromanipulators[1] |
| Enclosure | — | light-tight enclosure[1] |
| Use | — | device testing such as I-V measurements[1] |
| Equipment type | — | Probe station[1] |
| Supports wafer size | — | up to 6-inch wafers[1] |
| Supports substrate size | — | up to 150 mm (6 in.)[2] |
| Applications | — | DC and HF measurements; device and wafer characterization tests; failure analysis; submicron probing; MEMS and opto tests[2] |
| Category | — | Wet Processing / Clean[3] |
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