Comparison ledger
Heller 1088, Tokyo Electron Telindy Plus ALD High K Vertical, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1088Heller | Telindy Plus ALD High K VerticalTokyo Electron |
|---|---|---|
| OEM | Heller | Tokyo Electron |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Heller 1088 | Tokyo Electron Telindy Plus ALD High K Vertical |
| Specifications | ||
| Heating Zones | 8 zones (4 top and 4 below) plus 1 cooling zone[1] | — |
| Heating Method | Forced convection[1] | — |
| Conveyor Width | 18 inches (45 cm)[1] | — |
| Heated Length | 43.5 inches (111 cm)[1] | — |
| Overall Length | 96 inches (244 cm)[1] | — |
| Height | 50 inches (127 cm)[1] | — |
| Net Weight | 900 lbs (409 kg)[1] | — |
| Thermal Profiler | Included[1] | — |
| Oven Top | Counter balance for easy access to conveyor[1] | — |
| Solder Compatibility | Lead-free and leaded soldering[1] | — |
| Manufacturer | — | Tokyo Electron[2] |
| Model | — | Telindy Plus ALD High K Vertical[3] |
| Category | — | Thermal / Diffusion[4] |
| Tool type | — | vertical furnace for semiconductor processing[4] |
| Wafer size | — | 12 inch[3] |
| Process | — | ALDZROX 2.2[5] |
| Process temperature | — | 300C[5] |
| Wafer type | — | 300mm-Si SEMI STD-Notch[5] |
| Quantity of production wafers | — | 100wfr[5] |
| Boat operation | — | 2 Boat Operation (B/S)[5] |
| Boat type | — | 117 slots Ladder (8mm pitch)[5] |
| Boat material | — | Quartz[5] |
| Boat rotation | — | Yes[5] |
| Pedestal type | — | Quartz[5] |
| Cap heater | — | Yes[5] |
| Load lock | — | Yes[5] |
| O2 analyzer maker/model | — | NGK, SH-304 STANDARD[5] |
| Software version | — | Ver. 6.07 3.1.1[5] |
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