Comparison ledger
Filmetrics RS50, KLA 1007, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RS50Filmetrics | 1007KLA |
|---|---|---|
| OEM | Filmetrics | KLA |
| Category | Test & Probe | Test & Probe |
| Wafer size | 200mm | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Filmetrics RS50 | KLA 1007 |
| Specifications | ||
| Type | 4 Point Probe System Mapping 4 point Probe system[1] | — |
| Sheet resistance range | 1 mohm/sq to 200 Mohm/sq[1] | — |
| Wafer capability | 200 mm wafers capable[1] | — |
| Manufacturer | — | KLA[2] |
| Model | — | 1007[2] |
| Description | — | Wafer Prober[2] |
| Wafer size | — | 150 mm[2] |
| Convertible to 8 inch wafer size | — | Yes[2] |
| Vintage | — | 01.06.1995[2] |
| Make | — | KLA[3] |
| Equipment type | — | Prober[3] |
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