Waferpedia

Comparison ledger

850 Waferversus1 WBS 1 Wafer Substrate

EV Group 850 Wafer, Logitech 1 WBS 1 Wafer Substrate, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
850 WaferEV Group
OEMEV GroupLogitech
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyEV Group 850Logitech 1 WBS 1 Wafer Substrate
Specifications
Configuration50/60 Hz[1]—
Power Consumption28,9 kW[1]—
Full Load Current Rating89,1 A[1]—
Largest Current Rating28,9 A[1]—
Power5.5 kW[2]—
Voltage120/208 V, 3 Phase[2]—
ManufacturerEVG[1]—
Model850 Wafer[1]—
CategoryPackaging & Bonding[1]—
Wafer sizes2, 3, 4, 5, 6, 8, 12 inch[1]—
Wafer size limitup to 8 inch[1]—
Frequency50/60 Hz[1]—
Vintage2001[2]—
Wafer Size—6 inch[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing