Comparison ledger
EV Group 120 Automated Coater Processing, Lam Research SEZ SP 223 Spin Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 120 Automated Coater ProcessingEV Group | SEZ SP 223 Spin ProcessingLam Research |
|---|---|---|
| OEM | EV Group | Lam Research |
| Category | Resist Processing | Resist Processing |
| Wafer size | — | Patented Wafer Chuck or Holding Device |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | EV Group 120 Automated Coater Processing | Lam Research SEZ |
| Specifications | ||
| Configuration | 50/60 Hz[1] | 2 Chambers[2] |
| Phase | 3 Phase[1] | — |
| Wafer sizes | 6 inch, 8 inch[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Wiring configuration | 4 Wire + GND[1] | — |
| Vintage | 2015[1] | — |
| Wafer size | — | Patented Wafer Chuck or Holding Device[2] |
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