Comparison ledger
Edwards EPX 180 NE, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EPX 180 NEEdwards | |
|---|---|---|
| OEM | Edwards | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2008 Vintage year | — |
| Control system | — | — |
| Generation | — | — |
| Family | Edwards EPX 180 NE | Varian 0216 7696, E 11368072 ESC |
| Specifications | ||
| Pumping speed | 106 CFM[1] | — |
| Ultimate vacuum | < 7 x 10^-5 Torr[1] | — |
| Inlet | ISO63[1] | — |
| Exhaust | KF25[1] | — |
| Weight | 104 lbs[1] | — |
| Voltage | 200/208V[2] | — |
| Frequency | 50/60 Hz[2] | — |
| Current | 16 Amps[2] | — |
| Display and control panel | Integrated[2] | — |
| Gas purge | High temperature gas purge assembly[2] | — |
| Mounting | Metric eyebolt / heavy duty mount base[2] | — |
| Configuration | — | Platen ADV-S Type[3] |
| Type | — | ESC Platen ADV-S Type[3] |
| Category | — | Ion Implantation[4] |
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