Waferpedia

Comparison ledger

841 Backversus15

Disco 841 Back, Lapmaster 15, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
15Lapmaster
OEMDiscoLapmaster
CategoryDicing & GrindingDicing & Grinding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyDisco 841 BackLapmaster 15
Specifications
Wafer size range4 to 8 inches (100-200 mm)[1]—
Grinding typeIn-feed grinding with wafer rotation[1]—
Number of spindles2[1]—
Spindle speed range1000-7000 rpm[1]—
Vertical stroke110 mm[1]—
Chuck table typePorous chuck table with vacuum chuck[1]—
Grinding wheel diameter8 inches[1]—
Cassette capacityTwo cassettes for loading/unloading[1]—
Planarity accuracy (within wafer)0.0015 mm[1]—
ComplianceEC CE marking and SEMI S2-93 (DFG841)[1]—
Dimensions (W x D x H)1050 mm x 2150 mm x 1710 mm[1]—
Electrical requirements200V, 3 Phase, 50/60 Hz[1]—
CDA pressure0.5-0.8 MPa[1]—
DI water pressure and flow0.2-0.3 MPa, 15 l/min or higher[1]—
Input Power—110 Vac[2]
Plate Diameter—15 inches (381 mm)[3]
Number of Conditioning Rings—3[3]
Ring ID—5.5 inches (140 mm)[3]
Standard RPM—60[3]
RPM Range (Variable Speed Drive)—0-60[3]
Drive Motor - Lapper—0.5 HP (0.37 kW)[3]
Drive Motor - Polisher—0.75 HP (0.56 kW)[3]
Length—25 inches (635 mm)[3]
Width—20 inches (508 mm)[3]
Height—24 inches (610 mm)[3]
Estimated Shipping Weight—285 lbs (129.3 kg)[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]s3-alliance.coms3-alliance.com
  2. [2]inventory listing
  3. [3]web.archive.orgweb.archive.org