Comparison ledger
Disco 321, Disco DFD 6361 Fully Automatic Dicing, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 321Disco | |
|---|---|---|
| OEM | Disco | Disco |
| Category | Dicing & Grinding | Dicing & Grinding |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco 321 | Disco DFD 6361 Fully Automatic Dicing |
| Specifications | ||
| OEM | Disco[1] | — |
| Model | 321[1] | — |
| Equipment type | Wafer Dicing Saw[1] | — |
| Facility context | Cleanroom Instrumentation[1] | — |
| Application area | Nano and Micro Fabrication[1] | — |
| Location | FNT 4.106[1] | — |
| Wafer Size | Up to 6 inches[2] | — |
| Spindle Power | 1.0 kW Synchro Spindle (or 1.5 kW Synchro Spindle in some configurations)[3] | — |
| Spindle Power (alternate) | 1500 Watt spindle[2] | — |
| Non-Contact Setup | Non Contact Setup[3] | — |
| Microscope | Microscope With Eyepiece and Shutter (or Dual Objective Microscope With Eyepiece)[3] | — |
| Broken Blade Detection | Broken Blade Detection[3] | — |
| Light Tower | Includes Light Tower[3] | — |
| Chuck Type | 6" Universal Chuck (or 6" Porous Film Frame Chuck)[2] | — |
| Wafer size capability | Up to 6" wafers[3] | — |
| Chuck | 6-inch porous film frame chuck[2] | — |
| Spindle power | 1500-watt spindle[2] | — |
| Footprint | Small footprint[2] | — |
| Setup | Non-contact setup[3] | — |
| Blade break detection | Broken blade detection[3] | — |
| Other features | Floppy drive, light tower, blade tools, manuals[3] | — |
| Max workpiece size | — | 300 mm[4] |
| X-axis cutting range | — | 310 mm[4] |
| Cut speed | — | 0.1 to 600 mm/s[4] |
| Y1-axis cutting range | — | 310 mm[4] |
| Index step | — | 0.0001 mm[4] |
| Y2-axis positioning accuracy | — | 0.003 mm/310 (single error), ≤0.002 mm/5[4] |
| Z1-axis max stroke | — | 14.7 mm (for 2-inch blade)[4] |
| Z-axis moving resolution | — | 0.00005 mm[4] |
| Z2-axis repeating accuracy | — | 0.001 mm[4] |
| Maximum blade size | — | 58 mm diameter[4] |
| θ-axis max rotating angle | — | 380 degrees[4] |
| Spindle output (standard) | — | 1.2 kW at 60,000 min⁻¹[4] |
| Spindle speed range | — | 6,000 to 60,000 min⁻¹[4] |
| Power supply | — | 200-240 V AC ±10%, 3-phase, 50/60 Hz[4] |
| Power consumption (processing) | — | 2.2 kW (reference)[4] |
| Power consumption (warm-up) | — | 1.8 kW (reference)[4] |
| Air pressure | — | 0.5 to 0.8 MPa[4] |
| Average air consumption | — | 189.0 L/min (ANR, reference)[4] |
| Clean air pressure | — | 0.5 to 0.8 MPa[4] |
| Average clean air consumption | — | 65.0 L/min (ANR, reference)[4] |
| Cutting water pressure | — | 0.2 to 0.4 MPa[4] |
| Cutting water max flow rate | — | 12 L/min[4] |
| Water curtain max flow rate | — | 1 L/min[4] |
| Other water max flow rate | — | 1 L/min[4] |
| Cooling water pressure | — | 0.2 to 0.4 MPa[4] |
| Cooling water flow rate | — | 3.0 L/min at 0.3 MPa[4] |
| Exhaust duct capacity | — | 5.0 m³/min[4] |
| Machine dimensions (W×D×H) | — | 1200×1550×1800 mm[4] |
| Machine weight | — | Approx. 2,050 kg (without transformer), approx. 2,150 kg (with transformer)[4] |
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