Comparison ledger
Coherent Waferlase ID 200 Dry, Tegal 1512e, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Waferlase ID 200 DryCoherent | 1512eTegal |
|---|---|---|
| OEM | Coherent | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Coherent Waferlase ID 200 Dry | Tegal 1512e |
| Specifications | ||
| Gas | no chemicals, class 4 laser[1] | — |
| OS | Windows 10[1] | — |
| Note | quality issues[1] | — |
| Tool type | — | Industrial RIE plasma etcher system[2] |
| Stated configuration | — | With modules assembly for CI-4222[2] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →