Waferpedia

Comparison ledger

1000 Hot Plateversus58 SM HMDS Vacuum

CEE 1000 Hot Plate, YES 58 SM HMDS Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEEYES
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateYES 58
Specifications
Configuration4"[1]Refurbished[2]
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Manufacturer—Yield Engineering (YES)[3]
Model designation—58 SM / YES-58SM[2]
Family—YES 58 family[2]
Category—Thermal / Diffusion[2]
Equipment type—HMDS vacuum oven / HMDS vapor prime oven[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]ntc-tech.comntc-tech.com