Waferpedia

Comparison ledger

1000 Hot PlateversusTSE 11 A Thermal Shock

CEE 1000 Hot Plate, ESPEC TSE 11 A Thermal Shock, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEEESPEC
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateESPEC TSE 11
Specifications
Configuration4"[1]50/60 Hz[2]
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Phase—3 Phase[2]
Voltage—208 V[2]
Frequency—50/60 Hz[2]
OEM—ESPEC[2]
Model—TSE 11 A[2]
Equipment type—Thermal Shock Chamber[2]
Electrical—3 Phase - 208 V - 50/60 Hz[2]
Vintage—2004[2]
Last Confirm Date—March 09, 2026[5]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]Equipment inventory listing
  5. [5]Equipment inventory listing