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Comparison ledger

100 SpinversusGasonics PEP 3510 Plus Asher / Stripper

CEE 100 Spin, Lam Research Gasonics PEP 3510 Plus Asher / Stripper, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
100 SpinCEE
Gasonics PEP 3510 Plus Asher / StripperLam Research
OEMCEELam Research
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 100Lam Research Gasonics PEP 3510 Plus Asher / Stripper
Specifications
ConfigurationVolts 115[1]—
Wafer Size—8 inch[2]
100 Spin entryGasonics PEP 3510 Plus Asher / Stripper entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]Equipment inventory listing