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Comparison ledger

11000versusRS 75 TCA

Cascade Microtech 11000, KLA RS 75 TCA, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
11000Cascade Microtech
OEMCascade MicrotechKLA
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCascade Microtech 11000KLA RS 75
Specifications
ConfigurationWith antivibration table[1]1.8K Watts[4]
Voltage—115 V[3]
Model—RS 75 TCA[4]
Make—KLA[4]
Power—115 V, 1.8K Watts, 50/60 Hz[4]
Frequency—50/60 Hz[3]
Wafer size—6 inch, 8 inch[3]
Wafer handling—3 H type loader[3]
Type—Four Point Probe (4PP)[6]
Vintage—1999-3[6]
Tool type—Four-point probe (4PP)[6]
Manufacturer—KLA[3]
Category—Test & Probe[3]
Equipment type—Resistivity system[3]
Probe head / loading—3 H type loader[3]
Wafer handler—100 mm to 200 mm dual-cassette wafer handler[6]
Flat finder—Included[3]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]inventory listing
  5. [5]inventory listing
  6. [6]jenesisequipment.comjenesisequipment.com