Waferpedia

Comparison ledger

103-754versusPrecio Automatic Wafer

Cascade Microtech 103-754, Tokyo Electron Precio Automatic Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
103-754Cascade Microtech
OEMCascade MicrotechTokyo Electron
CategoryTest & ProbeTest & Probe
Wafer size6-inch diameter microchamber and thermal chuckSingle Foup Wafer Loader (Right)
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCascade Microtech 103-754Tokyo Electron Precio
Specifications
typex-y-z-θ probe positioner[1]—
installed onHFTL 50-GHz Small-Signal Probe Station[1]—
quantity in stationtwo[1]—
station chuck size6-inch-diameter microchamber and thermal chuck[1]—
Quantity per stationTwo positioners[1]—
Chuck size6-inch-diameter microchamber and thermal chuck[1]—
Temperature range-50 to 200 °C[1]—
Configuration—50/60 Hz[2]
Rated Power Input—200 V[2]
Rated Breaker Input—30 A[2]
Phase—1 Phase[4]
Power—2.9 kVA[4]
Wafer size—Single Foup Wafer Loader (Right)[5]
Wafer Size—12 inch[2]
Frequency—50/60 Hz[2]
Power Input—200 V[2]
Breaker Rating—30 A[2]
kVA Rating—2.9 kVA[4]
Loader Type—Single Foup Loader (Right)[2]
Interface Options—GPIB Tester Interface Options, Top Plate Unit, V93K PIB & Pogo Docking Type[2]
Vintage Year—2015[2]
Make—Tel[2]
Model—Precio[2]
Power rating—2.9 kVA[4]
Wafer loader—Single Foup Loader (Right)[2]
Tester interface—GPIB[2]
Available options—Top Plate Unit, V93K PIB & Pogo Docking Type[2]
Vintage—2015[2]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]cnf.cornell.educnf.cornell.edu
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]inventory listing
  5. [5]inventory listing