Comparison ledger
Cascade Microtech 103-754, SUSS MicroTec PM5, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 103-754Cascade Microtech | PM5SUSS MicroTec |
|---|---|---|
| OEM | Cascade Microtech | SUSS MicroTec |
| Category | Test & Probe | Test & Probe |
| Wafer size | 6-inch diameter microchamber and thermal chuck | 150mm |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Cascade Microtech 103-754 | SUSS MicroTec PM5 |
| Specifications | ||
| type | x-y-z-θ probe positioner[1] | — |
| installed on | HFTL 50-GHz Small-Signal Probe Station[1] | — |
| quantity in station | two[1] | — |
| station chuck size | 6-inch-diameter microchamber and thermal chuck[1] | — |
| Quantity per station | Two positioners[1] | — |
| Chuck size | 6-inch-diameter microchamber and thermal chuck[1] | — |
| Temperature range | -50 to 200 °C[1] | — |
| system type | — | analytical probe system[2] |
| wafer/substrate diameter | — | up to 150 mm (6″)[2] |
| measurement modes | — | DC and HF measurements[2] |
| failure analysis use | — | suitable as a failure analysis tool[2] |
| probe heads | — | up to 12 SUSS probe heads at one time[2] |
| manipulator probe function | — | nanowires may be picked and placed onto a device or substrate[2] |
| Measurement types | — | DC and HF[2] |
| Max probe heads | — | up to 12 SUSS probe heads[2] |
| Manipulator probe | — | for nanowire pick-and-place[2] |
| Wafer/substrate diameter | — | up to 150 mm (6 in)[2] |
| Failure analysis | — | suitable as a failure analysis tool[2] |
| Contact points | — | up to 4 contact points can be operated independently at the same time[3] |
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