Waferpedia

Comparison ledger

103-754versusS-460

Cascade Microtech 103-754, Signatone S-460, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
103-754Cascade Microtech
S-460Signatone
OEMCascade MicrotechSignatone
CategoryTest & ProbeTest & Probe
Wafer size6-inch diameter microchamber and thermal chuck6"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system—Windows
Generation——
FamilyCascade Microtech 103-754Signatone S-460
Specifications
typex-y-z-θ probe positioner[1]—
installed onHFTL 50-GHz Small-Signal Probe Station[1]—
quantity in stationtwo[1]—
station chuck size6-inch-diameter microchamber and thermal chuck[1]—
Quantity per stationTwo positioners[1]—
Chuck size6-inch-diameter microchamber and thermal chuck[1]—
Temperature range-50 to 200 °C[1]—
Probe station type—Semi-automatic probe station[2]
Wafer size—6"[2]
Wafer stage drive—Proprietary linear induction motor[2]
Positioning system—Optical feedback positioning system[2]
Wafer stepping—Automated wafer stepping controlled via Signatone Solutions Windows software[2]
Theta—Motorized theta with a quick two-point align feature[2]
Control era—Windows[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]cnf.cornell.educnf.cornell.edu
  2. [2]web.archive.orgweb.archive.org
  3. [3]waferpedia.comwaferpedia.com