Comparison ledger
Brooks 017-0146-01 Prealigner, OAI 806 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | 806 MaskOAI |
|---|---|---|
| OEM | Brooks | OAI |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | OAI 806 Mask |
| Cited variants | — |
|
| Specifications | ||
| Wafer size | — | 6 inch[2] |
| Model | — | 806[2] |
| Model variant | — | MBA 806[1] |
| Alignment accuracy | — | submicron[3] |
| Light source | — | collimated UV light source, 350W NUV lamphouse[3] |
| Workholding | — | vacuum chuck[3] |
| Microscope | — | integrated microscope optics with 5x objectives[3] |
| Stage | — | motorized stage with Thomson Industries Quickslide System[1] |
| Contact modes | — | soft, hard, and proximity contact[3] |
| Backside alignment | — | optional[3] |
| Wafer loading | — | manual[1] |
| Mask holders | — | 4 inch (3 inch round opening), 5 inch (4 inch round opening), 7 inch (6 inch round opening)[1] |
| BSA chucks | — | 3 inch, 4 inch, and 6 inch[1] |
| OEM | — | OAI[2] |
| Tool type | — | Mask Aligner[2] |
| Exposure modes | — | soft contact, hard contact, and proximity contact modes[3] |
| Optical source | — | collimated UV light source[3] |
| Alignment optics | — | integrated microscope optics[3] |
| Model designation | — | MBA806[1] |
| Manual wafer load | — | manual wafer load mask aligner[1] |
| Lamphouse | — | 350W NUV lamphouse[1] |
| Microscope light power supply | — | included[1] |
| Objectives | — | 5x objectives[1] |
| System | — | Thomson Industries Quickslide System[1] |
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