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017-0146-01 PrealignerversusNSR i 14 E i-Line

Brooks 017-0146-01 Prealigner, Nikon NSR i 14 E i-Line, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0146-01 PrealignerBrooks
NSR i 14 E i-LineNikon
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0146-01 PrealignerNikon NSR
Specifications
Configuration—I-line exposure[1]
OS—Open VMS[1]
Exposure type—i-line[1]
Operating system—Open VMS[1]
017-0146-01 Prealigner entryNSR i 14 E i-Line entryAsk about these tools →Share experience with this comparison →

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing