Comparison ledger
Brooks 017-0146-01 Prealigner, Karl Suss MJB-3, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | MJB-3Karl Suss |
|---|---|---|
| OEM | Brooks | Karl Suss |
| Category | Lithography | Lithography |
| Wafer size | — | 3" |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Karl Suss MJB-3 |
| Specifications | ||
| OEM | — | Karl Suss[1] |
| Model | — | MJB-3[1] |
| Type | — | Contact/proximity aligner[1] |
| Illumination wavelengths | — | 365 nm or 405 nm[1] |
| Resists | — | Used with a variety of both positive and negative photoresists[1] |
| Location | — | FabLab | Teaching Lab[1] |
| Maximum substrate diameter | — | up to 3"[1] |
| Sample compatibility | — | works for smaller samples[1] |
| Light options | — | 365 nm or 405 nm light[1] |
| Photoresist compatibility | — | a variety of both positive and negative photoresists[1] |
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