Comparison ledger
Brooks 017-0146-01 Prealigner, Canon FPA 6000 ES 6 a, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | FPA 6000 ES 6 aCanon |
|---|---|---|
| OEM | Brooks | Canon |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | Canon FPA 6000 |
| Specifications | ||
| Configuration | — | 248nm (KrF)[1] |
| Manufacturer | — | Canon[2] |
| Model | — | FPA 6000 ES 6 a[1] |
| Wafer size | — | 12 inch[1] |
| Exposure wavelength | — | 248nm (KrF)[2] |
| Process | — | DUV (248nm) KRF[3] |
| Category | — | Lithography[2] |
| Tool type | — | lithography scanner[2] |
| Numerical aperture (NA) | — | 0.55 ~ 0.86[4] |
| Resolution | — | 0.09µm[4] |
| Reticle size | — | 6in. (0.25in. thick)[4] |
| Reduction ratio | — | 4:1[4] |
| Field size | — | 26mm x 33mm[4] |
| Overlay accuracy | — | ≤8nm (M+3)[4] |
| Throughput | — | ≥100wph (300mm, 122shots); ≥170wph (200mm, 58shots)[4] |
| Scanner vintage | — | 2005[3] |
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