Waferpedia

Comparison ledger

017-0024-01 PrealignerversusAP200

Brooks 017-0024-01 Prealigner, Ultratech AP200, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
AP200Ultratech
OEMBrooksUltratech
CategoryLithographyLithography
Wafer size——
Process node——
Introduced—2004
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerUltratech AP200
Specifications
System type—Lithography system[1]
Application—Advanced packaging (AP)[1]
Platform—Unity Platform[1]
Platform introduction—Mid-2004 on AP bump tools[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]en.wikipedia.orgen.wikipedia.org