Waferpedia

Comparison ledger

017-0024-01 PrealignerversusMA 200 Compact Mask

Brooks 017-0024-01 Prealigner, SUSS MicroTec MA 200 Compact Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
MA 200 Compact MaskSUSS MicroTec
OEMBrooksSUSS MicroTec
CategoryLithographyLithography
Wafer size—Wafer Handler
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerSUSS MicroTec MA 200
Specifications
Phase—3 Phase +N +PE[1]
Configuration—50/60 Hz[1]
Voltage—400V[1]
Wafer size—Wafer Handler[1]
Handler Type—Robot[1]
Gas—N2[1]
Power—400V[1]
017-0024-01 Prealigner entryMA 200 Compact Mask entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Lithography process? Get a complete equipment list.

Open the fab equipment planner →
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing