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017-0024-01 PrealignerversusScanner 204 B

Brooks 017-0024-01 Prealigner, Nikon Scanner 204 B, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
017-0024-01 PrealignerBrooks
Scanner 204 BNikon
OEMBrooksNikon
CategoryLithographyLithography
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBrooks 017-0024-01 PrealignerNikon Scanner
Specifications
Configuration—0.15um[1]
Make—Nikon[1]
Model—Scanner 204 B[1]
Equipment type—Stepper[1]
Wafer sizes—6, 8 inch[1]
Resolution—0.15 µm[1]
Vintage—2005[1]
Category—Lithography[2]
017-0024-01 Prealigner entryScanner 204 B entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com