Waferpedia

Comparison ledger

0 V 500versusAlpha 8 S D Thermal Processing

Blue M 0 V 500, Tokyo Electron Alpha 8 S D Thermal Processing, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
OEMBlue MTokyo Electron
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—1996 Vintage
Control system——
Generation——
FamilyBlue M 0 V 500Tokyo Electron Alpha
Specifications
Water Exposure—water marks inside and outside the unit[1]
Wafer size—8 inch[1]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing