Waferpedia

Comparison ledger

0 500versusSteag / AST 2900 RTP

Blue M 0 500, Mattson Steag / AST 2900 RTP, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
OEMBlue MMattson
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500Mattson Steag / AST 2900 RTP
Specifications
ManufacturerBlue M[1]—
Model0 500[1]—
Asset number139866[1]—
Last confirm dateSeptember 10, 2025[1]—
Equipment typeOven[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing