Waferpedia

Comparison ledger

0 500versusPyramax 100 N

Blue M 0 500, BTU Pyramax 100 N, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 500Blue M
OEMBlue MBTU
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run—2007–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 500BTU Pyramax 100
Specifications
ManufacturerBlue M[1]—
Model0 500[1]—
Asset number139866[1]—
Last confirm dateSeptember 10, 2025[1]—
Equipment typeOven[1]Reflow oven[3]
Configuration—Nitrogen[2]
Phase—3 Phase[2]
Max Temp—400*C[2]
Atmosphere—Nitrogen[4]
Power—3-phase[2]
Power frequency—50/60 Hz[2]
Maximum temperature—400°C[2]
Heated zones—8 heated zones[4]
Heated zones arrangement—8 top & 8 bottom zones[4]
Total length—4.648 mm[4]
Heating length—2.540 mm[4]
Cooling length—711 mm[4]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]core-emt.comcore-emt.com