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Comparison ledger

P/N 1952-0047-0001 Lensversus05 LHP 151

Axcelis P/N 1952-0047-0001 Lens, Melles Griot 05 LHP 151, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
05 LHP 151Melles Griot
OEMAxcelisMelles Griot
CategoryPrecision OpticsPrecision Optics
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis P/N 1952-0047-0001 LensMelles Griot 05
Specifications
Configurationfor Ion Impanters[1]With 05 LPL 340 Power Supply (Does not power on)[2]
Equipment type—Laser[2]
Make—Melles Griot[2]
Model—05 LHP 151[2]
Power state—Does not power on[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com