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NV 6200 A Ionversus160 XP Ion

Axcelis NV 6200 A Ion, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
NV 6200 A IonAxcelis
160 XP IonVarian
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
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Lifecycle——
Lifecycle milestones——
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Generation——
FamilyAxcelis NV 6200 A IonVarian 160 XP Ion
Specifications
ConfigurationSource roughing pump needs replacement[1]150mm High Current IMP[2]
NV 6200 A Ion entry160 XP Ion entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com