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Comparison ledger

93 E 20 I D 0 MBS UPSversus0216 7696, E 11368072 ESC

Axcelis 93 E 20 I D 0 MBS UPS, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis 93 E 20 I D 0 MBS UPSVarian 0216 7696, E 11368072 ESC
Specifications
ConfigurationWith batteries[1]Platen ADV-S Type[3]
ManufacturerAxcelis[1]—
Model93 E 20 I D 0 MBS UPS[2]—
CategoryIon Implantation[2]Ion Implantation[4]
BatteriesIncluded[1]—
Type—ESC Platen ADV-S Type[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com