Comparison ledger
Axcelis 200 PCU, Axcelis 6200 A, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 PCUAxcelis | 6200 AAxcelis |
|---|---|---|
| OEM | Axcelis | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2000 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Axcelis 6200 A |
| Cited variants | — | |
| Specifications | ||
| P/N | SC 4840 A[3] | — |
| Frequency | 50 Hz[3] | — |
| Phase | 3 Phase[3] | — |
| Voltage | 400 V[3] | — |
| Configuration | — | Auto recipe load[4] |
| Equipment type | — | Ion implanter[4] |
| Wafer size | — | 6 inch[4] |
| Automatic recipe load | — | Supported[4] |
| Category | — | Ion Implantation[5] |
| Equipment type (NV 6200 A Ion) | — | Ion implanter made by Axcelis[6] |
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