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200 PCU Photoresist StabilizerversusACS 300

Axcelis 200 PCU Photoresist Stabilizer, SUSS MicroTec ACS 300, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
200 PCU Photoresist StabilizerAxcelis
ACS 300SUSS MicroTec
OEMAxcelisSUSS MicroTec
CategoryResist ProcessingResist Processing
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis NV GSD 200SUSS MicroTec ACS 300
Specifications
Configuration14 Amps[1]Developer (4)[3]
Voltage380 V[1]—
Frequency50 Hz[1]—
Phase3 Phase[1]—
200 PCU Photoresist Stabilizer entryACS 300 entryAsk about these tools →Share experience with this comparison →

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing