Comparison ledger
Axcelis 200 ACU, Lam Research Rainbow 4506 I, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | Rainbow 4506 ILam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research Rainbow |
| Specifications | ||
| Configuration | Parts Machine[1] | Oxide Etch[5] |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Wafer type | — | Jeida flat[5] |
| Valve type | — | AC4 Throttle / VAT Throttle[5] |
| Software | — | Classic 7.31-42[5] |
| RF | — | PDW2200 400Kc generator (main chamber)[5] |
| Robot type | — | Harmonic Drive[5] |
| Loader type | — | Hine indexers 38A[5] |
| Loadlock | — | Entrance (ISO chmbr) and Exit LL[5] |
| Turbo pumps | — | No[5] |
| Controllers | — | VAT controller ISO THV / AC4 controller main chamber THV[5] |
| GAS 1 | — | Ar: 500 sccm[5] |
| GAS 2 | — | CF4: 100 sccm[5] |
| GAS 3 | — | CHF3: 50 sccm[5] |
| GAS 4 | — | He: 1000 sccm[5] |
| GAS 5 | — | O2: 20 sccm[5] |
| GAS 6 | — | N2: 540 sccm[5] |
| Type | — | Plasma etcher[6] |
| Wafer sizes | — | 6 inch, 8 inch[5] |
| Process | — | Oxide etch[5] |
| Endpoint | — | Monochromator Endpoint[5] |
| RF cart | — | Present[5] |
| ISO module | — | Present[5] |
| GAS 7 | — | NF3: 1150 sccm[5] |
| GAS 8 | — | He: 480 sccm[5] |
Plan your fab
Building a Etch process? Get a complete equipment list.
Open the fab equipment planner →