Comparison ledger
ASML XT 1900 Gi, Ultratech 1000 Family, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | XT 1900 GiASML | 1000 FamilyUltratech |
|---|---|---|
| OEM | ASML | Ultratech |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML XT 1900 Gi | Ultratech 1000 Family |
| Specifications | ||
| Immersion Scanner | 193 mm[1] | — |
| Software Version | 5.1[2] | — |
| CIM | SECS[2] | — |
| Process | 40/45 nm[2] | — |
| Type | Immersion scanner[2] | — |
| Optics | 193 mm[2] | — |
| Wafer application | 300 mm wafer batch production[3] | — |
| Exposure wavelength | 193 nm[3] | — |
| Numerical aperture | 0.85~1.35[3] | — |
| Resolution | 40 nm[3] | — |
| CDU | 2.5 nm[3] | — |
| Overlay precision | 6 nm[3] | — |
| Throughput | 131 wafers/hour (based on 125 exposures per wafer)[3] | — |
| Tool type | — | Photolithography step-and-repeat 1X stepper[4] |
| Optical design | — | Wynne Dyson[4] |
| Magnification | — | 1X[4] |
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