Comparison ledger
ASML Twinscan AT 850 B Wafer, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 150 e MaskSUSS MicroTec | |
|---|---|---|
| OEM | ASML | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2002 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | ASML Twinscan AT 850 | SUSS MicroTec 150 e Mask |
| Specifications | ||
| Phase | 3 Phase[1] | — |
| Configuration | 50/60 Hz[1] | — |
| Power | 3 Phase[2] | — |
| Electrical frequency | 50/60 Hz[1] | — |
| Optics | Cymer laser[1] | — |
| Vintage | 2002 Vintage[1] | — |
Plan your fab
Building a Lithography process? Get a complete equipment list.
Open the fab equipment planner →