Comparison ledger
Applied Materials VIISTA Trident XP Ion Implant, Varian 0216 7696, E 11368072 ESC, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | VIISTA Trident XP Ion ImplantApplied Materials | |
|---|---|---|
| OEM | Applied Materials | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials VIISTA | Varian 0216 7696, E 11368072 ESC |
| Specifications | ||
| Process Type | Standard[1] | — |
| Scan Harness | Standard - Continuous[1] | — |
| Beamline | XP[1] | — |
| Profiler | Gen II Multipixel 2 piece cup[1] | — |
| Process Chamber Line Kit | Full Coverage[1] | — |
| Seismic Kit | Seismic[1] | — |
| Chiller | SMC Remote 20M[1] | — |
| Differential pumping | Standard[1] | — |
| Cryo Pump | OBIS 320FX w/ IS2000V(1) PSI[1] | — |
| Cryo Pump Facilities POC | SS Cryo Exh UP-Rough. DN-Hel.DN[1] | — |
| Power Kit | Std w/3 Pole 175A[1] | — |
| UPS | Standard UPS 3KVA[1] | — |
| Facilities (Air-N2-H2O) | Faci fr Bott w Manifold - Std[1] | — |
| Frequency | 60 Hz Operation[1] | — |
| Injector Kit | XP (LDPL) Vapo Ready[1] | — |
| Control system | w/ Hard disk drives[1] | — |
| Label Kit | Chinese Label Kit[1] | — |
| Load Lock Vent | Standard Finish[1] | — |
| Load Lock Vent Connection | Vent Connection Std Finish[1] | — |
| Elevator Chamber selection | Standard - TGV w/Peek[1] | — |
| OEM | Applied Materials / Varian[1] | — |
| Model | VIISTA Trident XP[1] | — |
| Orienter Selection | Laser - Belt drive 300mm[1] | — |
| Remote Harness Kit | 20M-Rem Harn/Heli-IS2000V[1] | — |
| Roughing Pump Supply | Customer Supplied Pumps Onsite[1] | — |
| Rough Pump Type | Edwards iGX100MTi - iGX100L[1] | — |
| Rough Pump Exhaust | Universal RP Exh - Floor[1] | — |
| Turbo Pump Supply | Customer Supplied Pumps Onsite[1] | — |
| Turbo Pump Type | Pfeiffer HI-PACE 2300[1] | — |
| Wafer Handler Side Window Kit | Side Window Kit[1] | — |
| VCS Software Package Version | VCS 9.XX (Latest revision)[1] | — |
| Plasma Flood Gun | XP-Standard Gas Box[1] | — |
| Gas Box | 10 Position[1] | — |
| Gas Box Exhaust | 10 Stk GB Dual Exh FM4910 - Up[1] | — |
| Manometer | Quad Mano 10Stk GB 0-1000 Pa[1] | — |
| Gas Stick Slot 1 | HP Ar/N2 CGA 580[1] | — |
| Gas Stick Slot 2 | PraxAir Boron VCR 1/4[1] | — |
| Gas Stick Slot 3 | PraxAir Arsine[1] | — |
| Gas Stick Slot 4 | PraxAir Phosphine - NSR[1] | — |
| Gas Stick Slot 5 | Praxair CO[1] | — |
| Gas Stick Slot 6 | PraxAir GeF4 - NSR[1] | — |
| Gas Stick Slot 7 | Praxair Boron VCR 1/4[1] | — |
| Gas Stick Slot 8 | XeH2[1] | — |
| Gas Stick Slot 9 | HP N2 CGA 580[1] | — |
| Purge Assembly Slot 7 & 10 | N2 w/Ext Fd - 10 Stick[1] | — |
| SS gaskets for all gas sticks | 10 stick gas box[1] | — |
| Argon External Purge Assembly | Ar Ext Purge w/Reg (Pos1)-Std[1] | — |
| Control System | with Hard disk drives[1] | — |
| Wafer Handling (Orienter) | Laser - Belt drive 300mm[1] | — |
| Configuration | — | Platen ADV-S Type[2] |
| Type | — | ESC Platen ADV-S Type[2] |
| Category | — | Ion Implantation[3] |
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