Comparison ledger
Applied Materials Precision Implant xR 200 S High Current, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Precision Implant xR 200 S High CurrentApplied Materials | 160 XP IonVarian |
|---|---|---|
| OEM | Applied Materials | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials xR 200 S | Varian 160 XP Ion |
| Specifications | ||
| Configuration | Chamber with Liners Turbo Pump (2)[1] | 150mm High Current IMP[3] |
| OEM | Applied Materials[1] | Varian[4] |
| Model | Precision Implant xR 200 S[1] | 160 XP Ion[4] |
| Category | Ion Implantation[2] | Ion Implantation[3] |
| Type | High Current Ion Implanter[2] | — |
| Wafer size | 8 inch[1] | — |
| Vacuum & pumping | Chamber with Liners Turbo Pump (2); Leybold Turbo Mech Parts; 8500 Cryo Pump (2); Backing Pumps (3); Cryo Pumps (2); Cryo Compressor Energy Range Acceleration Drift / Accel[2] | — |
| Tool type | — | ion implanter[3] |
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