Comparison ledger
Applied Materials E 500 EHPI Medium Current, Axcelis NV 8250 HT Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | E 500 EHPI Medium CurrentApplied Materials | NV 8250 HT IonAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | Wafer Position Detect | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials E 500 | Axcelis NV 8250 |
| Specifications | ||
| Loading Configuration | Open Cassette[2] | — |
| Software | V 13.30 rev D[3] | — |
| Floppy Drive Type | 3.5"[3] | — |
| Configuration | CE Mark[3] | 50/60 Hz[1] |
| Energy Range | 10 KeV - 200 KeV[2] | — |
| Solid State Scanner | 30 KV[3] | — |
| Gas Box Type | HP[2] | — |
| Computer Type | Pentium[3] | — |
| OEM | Applied Materials / Varian[3] | Axcelis[1] |
| Model | E 500 EHPI[2] | NV 8250 HT[1] |
| Category | Ion Implantation[2] | Ion Implantation[4] |
| Wafer Sizes | 6 inch[3] | — |
| Load Lock Turbo | V 300 HT[3] | — |
| Source Zone Turbo Pump | STP 1000[3] | — |
| Scanner Turbo Pump | STP 1000[3] | — |
| Analyzer Turbo Pump | V 300 HT[3] | — |
| Vacuum Pumps (3) | Edwards QDP 80, QMB 250[3] | — |
| Pump Type | Dry[3] | — |
| Wafer size | Wafer Position Detect[3] | — |
| Wafer size / detect | Wafer Position Detect[2] | — |
| Scanner | Solid State Scanner, 30 KV[3] | — |
| Control interface | GEM/SECS; SECS II Interface[3] | — |
| Voltage | — | 208 VAC[4] |
| Phase | — | 3 Phase[4] |
| Power | — | 36 kVA[1] |
| Input Breaker | — | 100 A[4] |
| Largest Load | — | 88 A[4] |
| Max. Interrupt Capacity | — | 85 A[4] |
| Wafer Size | — | 8 inch[1] |
| Frequency | — | 50/60 Hz[4] |
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