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Comparison ledger

Complus MP Darkfield Defectversus.204 PSL Wafer

Applied Materials Complus MP Darkfield Defect, KLA .204 PSL Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials Complus MP Darkfield DefectKLA .204 PSL Wafer
Specifications
ManufacturerApplied Materials[1]—
ModelComplus MP[1]—
System typeDarkfield defect inspection system[1]—
Wafer size8 inch[1]—
Configuration—NIST Traceable[2]
Wafer Size—8 inch[2]
Traceability—NIST[3]
Compatible Tools—Surfscan 6xy0, Sp1[2]
NIST Traceable—Yes[2]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com