Comparison ledger
Applied Materials Centura II, Axcelis 200 ACU, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Centura IIApplied Materials | 200 ACUAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Centura | Axcelis NV GSD 200 |
| Cited variants |
| — |
| Specifications | ||
| Configuration | DPS + Metal[2] | Parts Machine[4] |
| OEM | Applied Materials[1] | — |
| Model | Centura II[1] | 200 ACU[4] |
| Category | Etch[1] | — |
| Wafer sizes | 6 inch[2] | — |
| Configuration / options | DPS + Metal[1] | — |
| Chamber | DPS II / DPS / Super E / eMxP+ / MxP+ / MxP / eMAX[3] | — |
| Application | Poly / Metal / Oxide etch[3] | — |
| Wafer size | 6 inch[2] | 200mm[6] |
| Chamber options | DPS II, DPS, Super E, eMxP+, MxP+, MxP, eMAX[1] | — |
| Manufacturer | — | Axcelis[4] |
| Tool type | — | Asher[4] |
| Serial number | — | AU6A356AH[6] |
| Computer system | — | M 200 PC, M 200[7] |
| Part number | — | SC 4572 A[7] |
| Volts | — | 208[7] |
| Amps | — | 30[7] |
| Equipment type | — | Asher[4] |
| Wafer configuration | — | 8 inch[5] |
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