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Comparison ledger

0720 06060 PartversusEPS150

Applied Materials 0720 06060 Part, Cascade Microtech EPS150, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0720 06060 PartApplied Materials
EPS150Cascade Microtech
OEMApplied MaterialsCascade Microtech
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0720 06060 PartCascade Microtech EPS150
Specifications
ConfigurationContact Pin 24-20 Awg Crimp Gold Flash[1]Manual probe system with 4 independent probe micro-manipulators[3]
OEM—Cascade MicroTech[2]
Model—EPS150 Triax[2]
Equipment type—Probe Station[2]
Configured instruments—Keithley 2450 SMU and Agilent LCR meter[3]
Light shield enclosure—Present[2]
Probe system—Manual probe system with 4 independent probe micro-manipulators[2]
Enclosure—Light shield enclosure[4]
Applications—I-V characterization; low current measurements; C-V characterization at multiple frequencies; resistance and conductance measurements; sheet resistance and resistivity measurements of substrates and deposited films[4]
SMU voltage measurement range—10nV - 200V[2]
SMU voltage measurement resolution—10nV on 20mV range, 5mV on 200V range[2]
SMU current measurement range—10fA - 1A[2]
SMU current measurement resolution—10fA on 10nA range, 1uA on 1A range[2]
LCR meter frequency range—20Hz to 1MHz[2]
LCR meter test frequencies—over 8,600 test frequencies[2]
LCR meter basic accuracy—0.05%[2]
LCR meter resolution—6 digit resolution[2]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]smif.pratt.duke.edusmif.pratt.duke.edu
  3. [3]smif.pratt.duke.edusmif.pratt.duke.edu
  4. [4]waferpedia.comwaferpedia.com