Waferpedia

Comparison ledger

0242-36515 RTP XE Chamber Temperature Match KitversusSoltec XPM 3

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Vitronics Soltec XPM 3, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
Soltec XPM 3Vitronics
OEMApplied MaterialsVitronics
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Vitronics Soltec XPM
Specifications
Configuration—Zones (8)[1]
Number of heating zones—8[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing