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0242-36515 RTP XE Chamber Temperature Match KitversusMV 2200 CE Vacuum

Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, STS MV 2200 CE Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
0242-36515 RTP XE Chamber Temperature Match KitApplied Materials
MV 2200 CE VacuumSTS
OEMApplied MaterialsSTS
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—STS MV 2200 CE Vacuum
Specifications
Configuration—Programmable[1]
Equipment type—Vacuum furnace[1]
Make—STS[2]
Model—MV 2200 CE[2]
0242-36515 RTP XE Chamber Temperature Match Kit entryMV 2200 CE Vacuum entryAsk about these tools →Share experience with this comparison →

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Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing