Comparison ledger
Applied Materials 0242-36515 RTP XE Chamber Temperature Match Kit, Applied Materials Vantage Radiance Plus RTP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0242-36515 RTP XE Chamber Temperature Match KitApplied Materials | Vantage Radiance Plus RTPApplied Materials |
|---|---|---|
| OEM | Applied Materials | Applied Materials |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | (2) 25-wafer ADOE FOUP Load ports |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Applied Materials Vantage Radiance |
| Specifications | ||
| Configuration | — | 2 chambers[1] |
| Factory Interface | — | 5.3[2] |
| Wafer size | — | (2) 25-wafer ADOE FOUP Load ports[3] |
| Chambers | — | 2[1] |
| Wafer handling | — | (2) 25-wafer ADOE FOUP Load ports[2] |
| Version | — | 300 mm[4] |
| Vintage | — | 01.06.2010[5] |
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