Waferpedia

Comparison ledger

0041-39086 ESC PartversusTelius Dry

Applied Materials 0041-39086 ESC Part, Tokyo Electron Telius Dry, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Telius DryTokyo Electron
OEMApplied MaterialsTokyo Electron
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Tokyo Electron Telius
Specifications
Configuration—HDD[1]
Equipment type—Dry Etcher[2]
Manufacturer—TEL Tokyo Electron[2]
Model—Telius[1]
Wafer size—12 inch[1]
Wafer size/version—300 mm[2]
Vintage (unit)—01.06.2004[3]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]fabsurplus.comfabsurplus.com