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Comparison ledger

0041-39086 ESC PartversusUnaxis 790

Applied Materials 0041-39086 ESC Part, Plasma-Therm Unaxis 790, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
Unaxis 790Plasma-Therm
OEMApplied MaterialsPlasma-Therm
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—Plasma-Therm Unaxis 790
Cited variants—
  • Unaxis 790 Middle[1]
  • Unaxis 790 Right[2]
  • Plasma-Therm Unaxis 790 Dual Chamber Shuttle Load Lock System[3]
  • Plasma-Therm Unaxis 790 DRIE PECVD[4]
Specifications
Phase—3 Phase[5]
Configuration—5 Wire[5]
Voltage—208 Vac[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]nist.govnist.gov
  2. [2]nist.govnist.gov
  3. [3]capovani.comcapovani.com
  4. [4]semistarcorp.comsemistarcorp.com
  5. [5]inventory listing