Waferpedia

Comparison ledger

0041-39086 ESC PartversusConcept Two Speed S (A)

Applied Materials 0041-39086 ESC Part, Lam Research Concept Two Speed S (A), side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0041-39086 ESC PartApplied Materials
OEMApplied MaterialsLam Research
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2010 Vintage
Control system——
Generation——
Family—Lam Research Concept Two
Specifications
Configuration—Chamber Only[1]
Voltage—208 VAC[1]
Phase—3 Phase[1]
Full Load—21 A[1]
Main Breaker Rating—25 A[1]
Largest Load—8 A[1]
Interrupt Current—10 KA[1]
Type—Chamber Only[1]
Vintage—2010[1]
Frequency—50/60 Hz[1]
Full Load Current—21 A[1]

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Sources (1)Every fact above is drawn from these public sources
  1. [1]inventory listing